Semiconductor integrated circuit and method of manufacturing...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Bump leads

Reexamination Certificate

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C438S613000

Reexamination Certificate

active

06989597

ABSTRACT:
Prevention of coming off of the layer where the contacts are formed and the isolating film and breakage of the LSI is realized. To do this, a contact array is provided in which a plurality of contacts is formed so as to be aligned in the vertical and the horizontal directions. In the contact array, the contact formation spacing in both of the vertical and the horizontal directions is larger than the contact formation spacing determined by the manufacturing process. Consequently, the number of contacts formed in the contact array can be reduced to not more than the number of contacts that can be formed in the unit area determined by the process, so that prevention of coming off of the layer where the contacts are formed and the isolating film and breakage of the LSI can be realized.

REFERENCES:
patent: 5477933 (1995-12-01), Nguyen
patent: 6100591 (2000-08-01), Ishii
patent: 6313537 (2001-11-01), Lee et al.
patent: 2001 284536 (2001-10-01), None

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