Semiconductor inspection system

Details Semiconductor inspection system Semiconductor inspection system

2006-04-11

2006-04-11

Lee, John R. (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

Electron probe type

C382S149000, C382S151000

Reexamination Certificate

active

07026615

ABSTRACT:
An operator-free and fully automated semiconductor inspection system with high throughput is realized. All conditions required for capturing and inspection are generated from design information such as CAD data. In order to perform actual inspection under the conditions, a semiconductor inspection system is composed of a navigation system for generating all the conditions required for capturing and inspection from the design information and a scanning electron microscope system for actually performing capturing and inspection. Moreover, in the case of performing a matching process between designed data and a SEM image, deformed parts are corrected by use of edge information in accordance with multiple directions and smoothing thereof. Furthermore, a SEM image corresponding to a detected position is re-registered as a template, and the matching process is thereby performed.

REFERENCES:
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patent: 5872862 (1999-02-01), Okubo et al.
patent: 6539106 (2003-03-01), Gallarda et al.
patent: 6671405 (2003-12-01), Savakis et al.
patent: 11-038009 (2000-08-01), None

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