Active solid-state devices (e.g. – transistors – solid-state diode – Integrated circuit structure with electrically isolated... – Passive components in ics
Patent
1995-11-30
2000-02-08
Whitehead, Jr., Carl
Active solid-state devices (e.g., transistors, solid-state diode
Integrated circuit structure with electrically isolated...
Passive components in ics
257537, H01L 2900
Patent
active
060230916
ABSTRACT:
A sealable air gap (14) is formed between a heating element (16) and a base (11) to improve the thermal isolation of a semiconductor heater (10). A top layer (17) is formed over the heating element (16) which seals the air gap (14) so that the sealable air gap (14) can be at either atmospheric pressure or under a vacuum. The semiconductor heater (10) can be used in a variety of applications including as a heat source to adjust the resistivity of an overlying resistive layer (18). The embodiments of the semiconductor heater (10) also include a chemical sensor (20). Heat from a heating element (26) is used to keep an overlying layer of chemical sensing material (28) at an optimal temperature. The embodiments of the present invention also include a transducer (40) to heat a fluid (52) in a well (55) such as in an ink jet application.
REFERENCES:
patent: 4601777 (1986-07-01), Hawkins et al.
patent: 4638337 (1987-01-01), Torpey et al.
patent: 4639748 (1987-01-01), Drake et al.
patent: 4967589 (1990-11-01), Yagawara et al.
patent: 5169806 (1992-12-01), Hawkins et al.
patent: 5285131 (1994-02-01), Muller et al.
patent: 5345213 (1994-09-01), Semancik et al.
patent: 5450109 (1995-09-01), Hock
patent: 5510645 (1996-04-01), Fitch et al.
C.H. Mastrangelo et al., "Microfabricated Incandescent Lamps", Applied Optics, vol. 30, No. 7, Mar. 1991, pp.868-873.
C.H. Mastrangelo et al., "Vacuum-sealed Silicon Micromachined Incandescent Light Source", IEEE, 1989, pp. 503-506.
R.E. Cavicchi et al., "Optimized Temperature Pulse Sequences for the Enhancement of Chemically-specific Response Patterns from Micro-Hotplate Gas Sensors", Transducers-Eurosensors IX, Sweden, Jun. 25-29, 1995, pp. 823-826.
Goldman Kenneth G.
Kamekona Keith G.
Koch Daniel J.
Summers Mark D.
Hightower Robert F.
Jr. Carl Whitehead
Motorola Inc.
Potter Roy
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