Semiconductor flash memory device and fabrication method of same

Details Semiconductor flash memory device and fabrication method of same Semiconductor flash memory device and fabrication method of same

1996-12-27

1998-07-07

Crane, Sara W.

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

257315, 257316, 257317, 257336, H01L 2976

Patent

active

057773599

ABSTRACT:
A semiconductor flash memory device comprises a substrate, a plurality of buried bit lines, an insulation film, a floating gate, an inter-layer insulation film, and a control gate formed on the inter-layer insulation film. The fabrication method comprises forming the patterned first insulation films on the substrate, forming the gate insulation film on the substrate and between the patterned first insulation films, depositing a first poly-silicon layer on the gate insulation film and the patterned first insulation film, forming a floating gate by etching the first poly-silicon layer, forming a second insulation film on each of the floating gate and the substrate having the buried bit lines therein, and forming a control gate on the second insulation film. The flash memory device realizes high yield rate due to the simplified fabrication steps and facilitated fabrication.

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