Semiconductor element and process for production for the same

Details Semiconductor element and process for production for the same Semiconductor element and process for production for the same

1995-05-31

1997-05-06

Picardat, Kevin M.

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having schottky gate

438174, 438572, 438513, H01L 21265

Patent

active

056270909

ABSTRACT:
There is provided a semiconductor element having a Schottky electrode which forms a Schottky junction with an active layer formed on a compound semiconductor substrate characterized in that a modified layer is formed in at least a portion of a region of the active layer on which region the Schottky electrode is formed and a vicinity of that region.

REFERENCES:
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patent: 4879254 (1989-11-01), Tsuzuki et al.
patent: 4981809 (1991-01-01), Mitsuaki et al.
patent: 5006478 (1991-04-01), Kobayashi et al.
patent: 5032541 (1991-07-01), Sakamoto et al.
patent: 5087322 (1992-02-01), Lillienfeld et al.
patent: 5112763 (1992-05-01), Taylor et al.
patent: 5270228 (1993-12-01), Ishikawa

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