Semiconductor element

Active solid-state devices (e.g. – transistors – solid-state diode – Incoherent light emitter structure – With heterojunction

Reexamination Certificate

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Details

C257S080000, C257S199000, C257S077000, C257S096000, C257S194000, C257S097000, C438S022000

Reexamination Certificate

active

07067847

ABSTRACT:
On a substrate made of e.g., sapphire single crystal is formed an Al underlayer having FWHM X-ray rocking curve value of 90 seconds or below. A buffer layer is formed on the AlN underlayer and has a composition of AlpGaqIn1−p−qN (0≦p≦1, 0≦y≦q). A GaN-based semiconductor layer group is formed on the buffer layer.

REFERENCES:
patent: 5990495 (1999-11-01), Ohba
patent: 5990496 (1999-11-01), Kunisato et al.
patent: 6162656 (2000-12-01), Kunisato et al.
patent: 6232623 (2001-05-01), Morita
patent: 6265287 (2001-07-01), Tsujimura et al.
patent: 6455877 (2002-09-01), Ogawa et al.
patent: 6593016 (2003-07-01), Chiyo et al.
patent: 6677708 (2004-01-01), Hori et al.

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