Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2006-01-03
2009-10-27
Clark, S. V (Department: 2823)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
C438S615000
Reexamination Certificate
active
07608533
ABSTRACT:
There is described-novel bonding and interconnecting techniques for use with semiconductor die for the creation of thermally efficient, physically compliant Ultra High Vacuum Tubes and the novel tube resulting therefrom.
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Costello Kenneth A
Roderick Kevin James
Bach, Esq. Joseph
Clark S. V
Intevac, Inc.
Nixon & Peabody LLP
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