Semiconductor die analysis as a function of optical...

Details Semiconductor die analysis as a function of optical... Semiconductor die analysis as a function of optical...

2007-03-27

2007-03-27

Toatley, Jr., Gregory J. (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

Reexamination Certificate

active

10205780

ABSTRACT:
A light reflected from a semiconductor die is used for enhanced control of substrate removal from the die. According to an example embodiment of the present invention, light reflected from a semiconductor die as it is undergoing substrate removal is used to detect the progress of the substrate removal process, and the removal process is controlled therefrom. In different embodiments, the reflected light is used to detect the removal of a portion of a layer of material in the die and to detect the removal of an entire layer of material.

REFERENCES:
patent: 5362356 (1994-11-01), Schoenborn
patent: 5440141 (1995-08-01), Horie
patent: 5452953 (1995-09-01), Ledger
patent: 5465154 (1995-11-01), Levy
patent: 5969805 (1999-10-01), Johnson et al.
patent: 6028669 (2000-02-01), Tzeng
patent: 6211961 (2001-04-01), Maris
patent: 6261152 (2001-07-01), Aiyer
patent: 6277657 (2001-08-01), Nozawa et al.
patent: 6392756 (2002-05-01), Li et al.
patent: 6687014 (2004-02-01), Zaidi et al.
patent: 6806166 (2004-10-01), Birdsley et al.

Affiliated with

Also associated with

Rating

Semiconductor die analysis as a function of optical... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor die analysis as a function of optical..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor die analysis as a function of optical... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3802190