Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Reexamination Certificate
2006-11-21
2006-11-21
Pham, Hoai (Department: 2814)
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
C257S303000, C257S306000
Reexamination Certificate
active
07138675
ABSTRACT:
A semiconductor device is manufactured by forming a first insulating layer on a semiconductor substrate. First contact pads and second contact pads are formed that penetrate through the first insulating layer and are electrically connected to the semiconductor substrate. A second insulating layer is formed that has guide contact holes that expose upper surfaces of the first contact pads. An etch stopper is formed on bottoms and sidewalls of the guide contact holes of the second insulating layer. Bit lines are formed that are electrically connected to the semiconductor substrate by the second contact pads. The bit lines are electrically isolated from the first contact pads.
REFERENCES:
patent: 6586794 (2003-07-01), Nakamura et al.
patent: 6649508 (2003-11-01), Park et al.
patent: 2001-57666 (2001-07-01), None
patent: 2002-34468 (2002-05-01), None
Notice to Submit Response, Korean Application No. 10-2002-0063025, Sep. 23, 2004.
Cho Chang-hyun
Lee Sang-hyeon
Park Yang-keun
Myers Bigel & Sibley Sajovec, PA
Pham Hoai
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