Semiconductor devices and methods of manufacture thereof

Details Semiconductor devices and methods of manufacture thereof Semiconductor devices and methods of manufacture thereof

2009-11-25

2011-11-22

Pizarro Crespo, Marcos D (Department: 2814)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S030000, C257S510000

Reexamination Certificate

active

08063449

ABSTRACT:
Semiconductor devices and methods of manufacture thereof are disclosed. In a preferred embodiment, a method of manufacturing a semiconductor device includes providing a semiconductor wafer, forming at least one isolation structure within the semiconductor wafer, and forming at least one feature over the semiconductor wafer. A top portion of the at least one isolation structure is removed, and a liner is formed over the semiconductor wafer, the at least one feature, and the at least one isolation structure. A fill material is formed over the liner. The fill material and the liner are removed from over at least a portion of a top surface of the semiconductor wafer.

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