Semiconductor devices and methods of fabricating the same

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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Details

C257S296000, C257S412000, C438S300000, C438S303000

Reexamination Certificate

active

07132719

ABSTRACT:
As disclosed herein, a semiconductor device includes a gate and a silicon substrate having a field region and an active region. A gate dielectric layer formed on the upper surface of the active region of the silicon substrate and on a gate dielectric layer. The gate may include first and second sidewall dielectric layers sequentially formed on sidewalls of the gate, epitaxial silicon layers formed at both sides of the gate on the silicon substrate, first LDD regions formed in the silicon substrate below the second sidewall dielectric layers, second LDD regions formed at one sides of the first LDD regions below the epitaxial silicon layers, source/drain regions formed under the second LDD regions, and silicide layers formed on the gate and the source/drain regions.

REFERENCES:
patent: 5168072 (1992-12-01), Moslehi
patent: 5627097 (1997-05-01), Venkatesan et al.
patent: 5872039 (1999-02-01), Imai
patent: 6852600 (2005-02-01), Wang et al.
patent: 6872626 (2005-03-01), Cheng
patent: 6902980 (2005-06-01), Wang et al.

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