Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate
2008-01-01
2008-01-01
Doan, Theresa T. (Department: 2814)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
Insulated gate formation
C438S592000, C438S179000, C438S283000
Reexamination Certificate
active
07314814
ABSTRACT:
Semiconductor devices and methods of fabricating the same are disclosed. A disclosed method comprises: partially forming a first gate stack; partially forming a second gate stack adjacent the first gate stack; forming a first interlayer dielectric; and completing the formation of the first and second gate stacks after the first interlayer dielectric has filled a distance between the first and second gate electrodes.
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Doan Theresa T.
Dongbu Electronics Co. Ltd.
Saliwanchik Lloyd & Saliwanchik
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