Semiconductor device with silicon-film fins and method of...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S379000

Reexamination Certificate

active

10835122

ABSTRACT:
A semiconductor device includes a semiconductor substrate, an insulating film projected on a surface of the semiconductor substrate, a semiconductor film provided on a side surface of the insulating film, and MIS transistor formed in the semiconductor film, the MIS transistor having source, gate and drain region. The semiconductor device further includes a gate electrode provided on the gate region of the MIS transistor, the length of the gate electrode being larger than the thickness of the semiconductor film.

REFERENCES:
patent: 5225701 (1993-07-01), Shimizu et al.
patent: 5554870 (1996-09-01), Fitch et al.
patent: 6762448 (2004-07-01), Lin et al.
patent: 4-250667 (1992-09-01), None
patent: 5-283700 (1993-10-01), None
patent: 11-330462 (1999-11-01), None
E.J. Nowak et al., “A Functional FinFET-DGCMOS SRAM Cell,” International Electron Device Meeting, 2002, pp. 411-414.

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