Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Patent
1998-07-06
2000-08-15
Hardy, David
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
257369, 257382, 257384, H01L 2976, H01L 2994, H01L 31062, H01L 31113, H01L 31119
Patent
active
061040703
ABSTRACT:
A semiconductor device with reduced number of through holes is disclosed. A source region and a dielectric layer are connected by a conductive layer made of silicide formed on the surface of the source region and the dielectric layer commonly, and a drain region and an output electrode are connected by another conductive layer made of silicide. The conductive layer interconnecting the source region and the dielectric layer, and the conductive layer interconnecting the drain region and the output electrode are formed in one step as they are disposed beneath an insulation layer on the surface of the semiconductor substrate.
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Maruyama Hiroaki
Matsumoto Takeshi
Fenty Jesse A.
Hardy David
NEC Corporation
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