Semiconductor device with mushroom electrode and manufacture...

Details Semiconductor device with mushroom electrode and manufacture... Semiconductor device with mushroom electrode and manufacture...

2007-05-29

2007-05-29

Lebentritt, Michael (Department: 2812)

Semiconductor device manufacturing: process

Making field effect device having pair of active regions...

Having schottky gate

C438S574000, C438S949000, C438S950000, C257SE21205, C257SE21455, C257SE21638

Reexamination Certificate

active

10768092

ABSTRACT:
A semiconductor device has: a semiconductor substrate having a pair of current input/output regions via which current flows; an insulating film formed on the semiconductor substrate and having a gate electrode opening; and a mushroom gate electrode structure formed on the semiconductor substrate via the gate electrode opening, the mushroom gate electrode structure having a stem and a head formed on the stem, the stem having a limited size on the semiconductor substrate along a current direction and having a forward taper shape upwardly and monotonically increasing the size along the current direction, the head having a size expanded stepwise along the current direction, and the stem contacting the semiconductor substrate in the gate electrode opening and riding the insulating film near at a position of at least one of opposite ends of the stem along the current direction.

REFERENCES:
patent: 4224089 (1980-09-01), Nishimoto et al.
patent: 4824767 (1989-04-01), Chambers et al.
patent: 4959326 (1990-09-01), Roman et al.
patent: 5185277 (1993-02-01), Tung et al.
patent: 5712175 (1998-01-01), Yoshida
patent: 5939737 (1999-08-01), Hirano
patent: 5970328 (1999-10-01), Park et al.
patent: 6037245 (2000-03-01), Matsuda
patent: 6051454 (2000-04-01), Anda et al.
patent: 6051484 (2000-04-01), Morizuka
patent: 6180528 (2001-01-01), Sasaki et al.
patent: 6387783 (2002-05-01), Furukawa et al.
patent: 6392278 (2002-05-01), Kimura
patent: 02142143 (1990-05-01), None

Affiliated with

Also associated with

Rating

Semiconductor device with mushroom electrode and manufacture... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor device with mushroom electrode and manufacture..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor device with mushroom electrode and manufacture... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3723660