Semiconductor device with increased distance between channel edg

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer

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438159, 438163, H01L 2100, H01L 2184

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active

06010922&

ABSTRACT:
The semiconductor device of this invention includes a substrate having an insulating surface and a thin film transistor formed on the substrate, wherein the thin film transistor has a semiconductor island including a channel region and source/drain regions, a gate insulating film formed on the semiconductor island and a gate electrode covering the channel region of the semiconductor island interposing the gate insulating film therebetween, and wherein a distance between an edge of the channel region of the semiconductor island and the gate electrode is larger than a distance between a central portion of the channel region of the semiconductor island and the gate electrode.

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