Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate
2006-07-31
2011-11-22
Zarneke, David (Department: 2891)
Semiconductor device manufacturing: process
Coating with electrically or thermally conductive material
To form ohmic contact to semiconductive material
C438S622000, C257S750000, C257S758000, C257S760000, C257SE23153, C257SE21575, C257S773000
Reexamination Certificate
active
08062974
ABSTRACT:
Conductions and vias between different, stacked metallic layers of a semiconductor device may be mechanically damaged by mechanical strain. According to an exemplary embodiment of the present invention, this mechanical strain may be transferred through the layer structure to the substrate by a grid of grounding structures and isolation and passivation layers which are connected by the grounding structures. This may provide for an enhancement of the lifetime of the semiconductor devices.
REFERENCES:
patent: 5763936 (1998-06-01), Yamaha et al.
patent: 5880529 (1999-03-01), Barrow
patent: 7067902 (2006-06-01), Hichri et al.
patent: 2005/0118803 (2005-06-01), Hichri et al.
patent: 0924762 (1999-06-01), None
patent: 2001053148 (2001-02-01), None
Habenicht Soenke
Thorns Ansgar
Zeile Heinrich
NXP B.V.
Zarneke David
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