Semiconductor device with gate-undercutting recessed region

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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Details

C257S204000, C257S346000, C257S387000, C257SE29039

Reexamination Certificate

active

08049254

ABSTRACT:
A semiconductor device comprises a gate structure on a semiconductor substrate and a recessed region in the semiconductor substrate. The recessed region has a widest lateral opening that is near a top surface of the semiconductor substrate. The widest lateral opening undercuts the gate structure.

REFERENCES:
patent: 6946350 (2005-09-01), Lindert et al.
patent: 7153753 (2006-12-01), Forbes
patent: 2005/0045969 (2005-03-01), Lee et al.
patent: 2005/0148147 (2005-07-01), Keating et al.
patent: 2007/0004123 (2007-01-01), Bohr et al.
patent: 2007/0111417 (2007-05-01), Bryant et al.

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