Semiconductor device with a plurality of isolated conductive...

Active solid-state devices (e.g. – transistors – solid-state diode – With means to increase breakdown voltage threshold

Reexamination Certificate

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C257S349000

Reexamination Certificate

active

07855427

ABSTRACT:
A semiconductor layer provided on a BOX (buried oxide) layer includes a first P-type region, an N+-type region, and an N−-type region which together form a diode. A plurality of second P-type regions are provided on a bottom part of the semiconductor layer. A plurality of insulating oxide films are interposed between the plurality of second P-type regions. When the diode is in a reverse-biased state, the second P-type region directly below the N+-type region is approximately the same in potential as the N+-type region. The second P-type region will be lower in potential relative to this second P-type region directly below the N+-type region, as the second P-type region gets nearer to the first P-type region. Electric field concentration can thus be relaxed at an interface between the semiconductor layer and the BOX layer, whereby improvement in breakdown voltage of the diode is realized.

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Hideyuki Funaki, et al., “New 1200V MOSFET Structure on SOI with SIPOS Shielding Layer”, Proceedings of 1998 International Symposium on Power Semiconductor Devices & ICs, pp. 25-28.

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