Semiconductor device wiring and method of manufacturing the...

Details Semiconductor device wiring and method of manufacturing the... Semiconductor device wiring and method of manufacturing the...

2006-03-14

2006-03-14

Kang, Donghee (Department: 2811)

Active solid-state devices (e.g., transistors, solid-state diode

Combined with electrical contact or lead

Of specified material other than unalloyed aluminum

C257S751000, C257S752000, C257S759000, C257S774000, C438S624000, C438S626000, C438S633000, C438S639000

Reexamination Certificate

active

07012335

ABSTRACT:
A wiring of a semiconductor device and a method of manufacturing the same are disclosed. A first conductive layer is formed on a semiconductor substrate followed by a first insulation material which is deposited on the first conductive layer to form a first insulation layer. Then, a CMP process is implemented to form the first insulation layer. A second insulation layer is formed by depositing a second insulation material on the first insulation layer in order to cover a scratch formed on the first insulation layer after implementing the CMP process. A first etching pattern is formed by etching the second insulation layer to a thickness less than a thickness of the second insulation layer. Thereafter, a conductive material is deposited on the etching pattern and then a planarizing process is implemented to form a conductive pattern having a damascene shape. The formation of a bridge between neighboring conductive patterns caused by a scratch generated during implementation of CMP process can be prevented to markedly decrease defects in semiconductor devices.

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