Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
Reexamination Certificate
2007-02-23
2010-12-14
Landau, Matthew C (Department: 2813)
Semiconductor device manufacturing: process
With measuring or testing
Electrical characteristic sensed
C257SE21521, C257SE23080
Reexamination Certificate
active
07851237
ABSTRACT:
Semiconductor device test structures and methods are disclosed. In a preferred embodiment, a test structure includes a feed line, a stress line disposed proximate the feed line, and a conductive feature disposed between the stress line and the feed line. The test structure includes a temperature adjuster proximate at least the conductive feature, and at least one feedback device coupled to the temperature adjuster and at least the conductive feature.
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Crawford Latanya
Infineon - Technologies AG
Landau Matthew C
Slater & Matsil L.L.P.
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