Semiconductor device test structures and methods

Details Semiconductor device test structures and methods Semiconductor device test structures and methods

2007-02-06

2010-12-28

Coleman, W. David (Department: 2813)

Semiconductor device manufacturing: process

With measuring or testing

Electrical characteristic sensed

C257SE21522

Reexamination Certificate

active

07858406

ABSTRACT:
Semiconductor device test structures and methods are disclosed. In a preferred embodiment, a test structure includes a feed line disposed in a first conductive material layer, and a stress line disposed in the first conductive material layer proximate the feed line yet spaced apart from the feed line. The stress line is coupled to the feed line by a conductive feature disposed in at least one second conductive material layer proximate the first conductive material layer.

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