Semiconductor device manufacturing: process – Bonding of plural semiconductor substrates – Subsequent separation into plural bodies
Reexamination Certificate
2007-06-12
2007-06-12
Jackson, Jerome (Department: 2815)
Semiconductor device manufacturing: process
Bonding of plural semiconductor substrates
Subsequent separation into plural bodies
C438S455000, C156S230000, C156S235000
Reexamination Certificate
active
10973426
ABSTRACT:
It is an object of the invention to provide a lightweight semiconductor device having a highly reliable sealing structure which can prevent ingress of impurities such as moisture that deteriorate element characteristics, and a method of manufacturing thereof. A protective film having superior gas barrier properties (which is a protective film that is likely to damage an element if the protective film is formed on the element directly) is previously formed on a heat-resistant substrate other than a substrate with the element formed thereon. The protective film is peeled off from the heat-resistant substrate, and transferred over the substrate with the element formed thereon so as to seal the element.
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International Search Report and Written Opinion of Jun. 4, 2005 for PCT/JP2004/016180.
Fukumoto Yumiko
Goto Yuugo
Maruyama Junya
Takayama Toru
Tsurume Takuya
Díaz José R.
Jackson Jerome
Robinson Eric J.
Robinson Intellectual Property Law Office P.C.
Semiconductor Energy Laboratory Co,. Ltd.
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