Semiconductor device manufacturing method, mask...

Details Semiconductor device manufacturing method, mask... Semiconductor device manufacturing method, mask...

2006-04-26

2010-10-26

Rosasco, Stephen (Department: 1795)

Radiation imagery chemistry: process, composition, or product th

Imaging affecting physical property of radiation sensitive...

Making electrical device

C430S005000, C430S394000

Reexamination Certificate

active

07820364

ABSTRACT:
In order to form a transfer pattern of desired size with high accuracy, a method for manufacturing a semiconductor device includes a process of forming the transfer pattern including a line whose width and angle varies, by performing multiple exposure using a plurality of masks having different patterns over different mask substrates.

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