Semiconductor device manufacturing method and display device

Details Semiconductor device manufacturing method and display device Semiconductor device manufacturing method and display device

2011-04-05

2011-04-05

Bryant, Kiesha R (Department: 2891)

Semiconductor device manufacturing: process

Formation of semiconductive active region on any substrate

Amorphous semiconductor

C117S904000, C257SE21134

Reexamination Certificate

active

07919399

ABSTRACT:
Disclosed herein is a semiconductor device manufacturing method for performing an annealing process of irradiating a semiconductor film on which element forming areas including thin film transistor forming areas are arranged in a two-dimensional pattern with energy beams using a plurality of irradiating optical systems, wherein in the annealing process, an area irradiated with the energy beams is divided into a single beam irradiated area irradiated by each of the plurality of irradiating optical systems with an energy beam singly and a boundary area situated between single beam irradiated areas adjacent to each other and irradiated by both of two irradiating optical systems performing beam irradiation of the single beam irradiated areas with energy beams.

REFERENCES:
patent: 6809013 (2004-10-01), Ito
patent: 2001/0019863 (2001-09-01), Yang
patent: 2002/0130279 (2002-09-01), Jain et al.
patent: 2004/0119955 (2004-06-01), Tanaka
patent: 2006/0166469 (2006-07-01), Nakayama et al.
patent: 2003-332235 (2003-11-01), None
patent: 2004-153150 (2004-05-01), None

Affiliated with

Also associated with

Rating

Semiconductor device manufacturing method and display device does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor device manufacturing method and display device, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor device manufacturing method and display device will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-2619649