Semiconductor device, manufacturing method and apparatus for...

Metal fusion bonding – Process – Plural joints

Reexamination Certificate

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Details

C228S220000, C228S248100, C438S613000, C438S614000, C438S615000

Reexamination Certificate

active

07611041

ABSTRACT:
A highly reliable semiconductor chip electrode structure allowing control of interface reaction of bonding sections even in the case of using two- or three-element solder used conventionally is disclosed. A solder alloy making layer for preventing dissolving and diffusion of tin into tin-based lead free solder is thinly formed on a UBM layer. The tin-based solder is supplied in solder paste or solder ball form. A combined solder alloy layer composed of a combination of intermetallic compounds, one of tin and the solder alloy making layer, and one of tin and the UBM layer, is formed by heating and melting.

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