Semiconductor device making method

Details Semiconductor device making method Semiconductor device making method

1997-03-18

1999-12-07

Niebling, John F.

Semiconductor device manufacturing: process

Coating of substrate containing semiconductor region or of...

438102, 438784, 438623, 438789, 438790, H01L 2131, H01L 21469

Patent

active

059983035

ABSTRACT:
A method for making a semiconductor device includes:

REFERENCES:
patent: 4575464 (1986-03-01), Grain
patent: 5221640 (1993-06-01), Sato
patent: 5227337 (1993-07-01), Kadomura
patent: 5451260 (1995-09-01), Versteeg et al.
patent: 5700736 (1997-12-01), Muroyama
patent: 5750211 (1998-05-01), Weise et al.

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