Semiconductor device inspection apparatus

Details Semiconductor device inspection apparatus Semiconductor device inspection apparatus

2008-06-03

2010-11-23

Wells, Nikita (Department: 2881)

Radiant energy

Inspection of solids or liquids by charged particles

C250S310000, C250S397000, C250S492200, C250S492300

Reexamination Certificate

active

07838828

ABSTRACT:
A semiconductor device inspection apparatus having a noise subtraction function includes an electron gun, a stage for holding a sample, a main detector for detecting a signal discharged from the sample, and at least one or more sub detector for detecting noise generated from the sample or apparatus so that there can be obtained an image in which the noise caused by discharge generated on the sample or in the apparatus is removed from the signal. The noise subtraction function subtracts the noise detected by the sub detector from the signal detected by the main detector to remove or reduce the noise from the signal.

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patent: 7181060 (2007-02-01), Honda et al.
patent: 7230723 (2007-06-01), Yamaguchi et al.
patent: 7285777 (2007-10-01), Kawada et al.
patent: 2002-124555 (2002-04-01), None

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