Semiconductor device including multiple field effect...

Details Semiconductor device including multiple field effect... Semiconductor device including multiple field effect...

2005-02-08

2005-02-08

Brewster, William M. (Department: 2823)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S351000, C257S392000

Reexamination Certificate

active

06853030

ABSTRACT:
A semiconductor device and a manufacturing method thereof permitting the quality of gate insulating films to be prevented from deteriorating and thereby permitting electrical characteristics of the device to be prevented from deteriorating are provided. In a semiconductor device including a plurality of field effect transistors, an oxidation protection film21is formed on a side of one gate electrode19.

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Stanley Wolf, Ph.D., “Silicon Processing for the VLSI Era vol. 3: The Subicron MOSFET,” Latice Press, 1995, pp. 646-661.

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