Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – On insulating substrate or layer
Reexamination Certificate
2011-07-12
2011-07-12
Pizarro, Marcos D. (Department: 2814)
Semiconductor device manufacturing: process
Making field effect device having pair of active regions...
On insulating substrate or layer
C438S168000, C438S187000, C438S198000
Reexamination Certificate
active
07977169
ABSTRACT:
A semiconductor device includes an oxide semiconductor thin film layer primarily including zinc oxide having at least one orientation other than (002) orientation. The zinc oxide may have a mixed orientation including (002) orientation and (101) orientation. Alternatively, the zinc oxide may have a mixed orientation including (100) orientation and (101) orientation.
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Furuta Hiroshi
Furuta Mamoru
Hiramatsu Takahiro
Hirao Takashi
Matsuda Tokiyoshi
Casio Computer Co. Ltd.
Holtz Holtz Goodman & Chick PC
Kochi Industrial Promotion Center
Montalvo Eva Y.
Pizarro Marcos D.
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