Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode
Patent
1991-06-24
1993-11-30
Prenty, Mark V.
Active solid-state devices (e.g., transistors, solid-state diode
Field effect device
Having insulated electrode
257344, 257369, 257408, 257653, H01L 2701, H01L 2910, H01L 2702, H01L 2906
Patent
active
052668231
ABSTRACT:
According to this present invention, a semiconductor device includes source and drain diffusion layers, and a gate electrode formed on a substrate between the source diffusion layer and the drain diffusion layer. In addition, antioxidant films are respectively formed on the source diffusion layer and the drain diffusion layer. These antioxidant films are used for controlling a diffusion rate of an impurity contained in the source diffusion layer and the drain diffusion layer.
REFERENCES:
patent: 4623912 (1986-11-01), Chang et al.
patent: 4937645 (1990-06-01), Ootsuka et al.
Kishi Koichi
Kohyama Yusuke
Noji Hiroyuki
Sugiura Soichi
Kabushiki Kaisha Toshiba
Prenty Mark V.
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