Semiconductor device having element isolation

Details Semiconductor device having element isolation Semiconductor device having element isolation

1996-07-08

2000-05-09

Saadat, Mahshid

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

257349, 257394, H01L 2701, H01L 310392

Patent

active

060607513

ABSTRACT:
A semiconductor device comprises a composite substrate comprising a semiconductor substrate and a semiconductor layer on said semiconductor substrate with a dielectric layer interposed therebetween; a plurality of element regions formed in the semiconductor layer and each having formed a field effect transistor including a source region and a drain region of a first conduction type; and an impurity-diffused region of a second conduction type which is formed directly under an element isolating film isolating respective elements. The impurity-diffused region having the opposite conduction type and formed under the element separating film restrain formation of parasitic transistors and prevent a decrease in threshold value.
The semiconductor device can be fabricated by preparing a SOI substrate; making a mask on the composite substrate and having an aperture on a location to be used for isolating elements; using the mask to form both an element isolating insulation film and first conduction type impurity-diffused regions in locations corresponding to outer marginal portions of elements to be made; and forming second conduction type impurity-diffused regions on the semiconductor layer as sources of drains of the elements.

REFERENCES:
patent: 5294821 (1994-03-01), Iwamatsu
patent: 5359219 (1994-10-01), Hwang

Affiliated with

Also associated with

Rating

Semiconductor device having element isolation does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor device having element isolation, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor device having element isolation will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1067597