Semiconductor device having bent gate electrode and process...

Details Semiconductor device having bent gate electrode and process... Semiconductor device having bent gate electrode and process...

1999-05-10

2001-06-12

Chaudhuri, Olik (Department: 2814)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S368000, C257S401000, C257S412000, C438S284000, C438S286000, C438S585000, C438S587000, C438S588000, C438S592000

Reexamination Certificate

active

06246080

ABSTRACT:

BACKGROUND OF THE INVENTION
1. Field of the Invention
The present invention relates to a semiconductor device with a bent gate, particularly a semiconductor device having a MOSFET with a bent gate.
2. Description of the Prior Art
MOSFETs having a bent gate have been used to meet the requirements of the production, properties and layout. As shown in
FIG. 12
, when ion injection is made slightly obliquely using a gate electrode
33
as a mask, to form impurity-injected regions
39
a
and
39
b
in an active region, a non-injected region remains between the gate electrode
33
and the impurity-injected region
39
a
and, as a result, asymmetry appears between the region
39
a
and the region
39
b
. Hence, it is disclosed in JP-A-
2-250332
that when a gate electrode
33
is formed on an active region
34
in a shape bent by 90° as shown in
FIG. 13
, shade does not appear in all of the vicinity of the gate electrode
33
even when ion injection is made slightly obliquely, and improved symmetry is obtained.
A large gate width results in a decreased resistance of channel region and accordingly in an increased transfer speed of signal. Hence, the use of a bent gate makes it possible to have a large gate width in a narrow region, which widen the degree of freedom in the layout of MOSFET.
As shown in
FIG. 14
, with a bent gate, the gate width is relatively large and yet a small distance between a contact and gate electrode can be secured, whereby a decreased parasitic resistance can be obtained. That is, several contacts (indicated by contacts
35
b
in
FIG. 14
) are formed for decreased parasitic resistance; however, by using a bent gate, a decreased parasitic resistance can be obtained by using one contact
35
a
in an active region
34
c
which is inside of the bent portion of bent gate. Further in
FIG. 14
, the area of the active region
34
c
is ⅓ of that of an active region
34
d
(which is outside of the bent portion of bent gate); therefore, the parasitic capacitance of the active region
34
c
to the semiconductor substrate can be reduced to ⅓ of that of the active region
34
d.
The positional relationship between bent gate and active region has been such that the boundary
37
of the active region
34
and the element-isolating region
36
intersects the gate electrode
33
at right angles, as shown in FIG.
13
.
In such a positional relationship between bent gate and active region, however, when mask misalignment takes place in formation of element-isolating region
36
and resultant determination of active region or in formation of gate electrode
33
, the relative position of gate electrode
33
and active region shifts as shown in
FIG. 15
by an active region
34
a
(when there is no misalignment) and an active region
34
b
(when there is misalignment); as a result, the formed width of channel becomes different from the width of layout and no intended transistor properties are obtainable.
As shown in
FIG. 16
, when two MOSFETs each having a bent gate are formed symmetrically for the layout requirement and when misalignment takes place, the width of gate decreases in the left MOSFET and conversely increases in the right MOSFET. The balance in transistor properties are adversely lost.
SUMMARY OF THE INVENTION
The present invention has been completed in order to solve the above-mentioned problems of the prior art. The present invention has an object of providing a semiconductor device in which the variation in gate width is small and accordingly the variation in properties is small even when the relative position of gate electrode and active region of MOSFET has shifted.
The present invention is directed to a semiconductor device comprising, on a semiconductor substrate, an element-isolating region, an active region, and a gate electrode with a bent portion having a bent-angle &thgr; on the active region, wherein the boundary between the element-isolating region and the active region intersects the gate electrode so that the line segments of the boundary at which said intersection takes place, are approximately parallel to the bisector of the bent-angle &thgr; of the bent portion of the gate electrode.
The present invention is also directed to a process for producing a semiconductor device comprising, on a semiconductor substrate, an element-insulating region, an active region, and a gate electrode with a bent portion having an angle &thgr; on the active region, wherein the process comprises the steps of:
forming, on a predetermined region of the semiconductor substrate, a mask having such a shape that the circumference of the mask intersects the gate electrode to be formed in a later step and that the line segments of the mask circumference at which the intersection takes place, are approximately parallel to the bisector of the bent-angle &thgr; of the bent portion of the gate electrode;
forming, on the area of the semiconductor substrate not covered with the mask, the element-isolating region and thereby determining the active region;
removing the mask and then forming the gate electrode having a bent portion; and
conducting ion injection using the gate electrode as a mask to form impurity-injected regions in the active region.


REFERENCES:
patent: 4737837 (1988-04-01), Lee
patent: 5490095 (1996-02-01), Shimada et al.
patent: 62-244148 (1987-10-01), None
patent: 1-235275 (1989-09-01), None
patent: 2-170437 (1990-07-01), None
patent: 2-250332 (1990-10-01), None
patent: 3257861 (1991-11-01), None
patent: 4-164371 (1992-06-01), None
patent: 5-136407 (1993-06-01), None

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