Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Physical deformation
Reexamination Certificate
2005-03-31
2008-09-23
Shah, Manish S. (Department: 2853)
Active solid-state devices (e.g., transistors, solid-state diode
Responsive to non-electrical signal
Physical deformation
C257S414000, C257S416000, C257S417000, C257S418000, C257S419000
Reexamination Certificate
active
07427797
ABSTRACT:
A semiconductor device having a surface MEMS element, includes a semiconductor substrate, and an actuator which is arranged above the semiconductor substrate via a space and has a lower electrode, an upper electrode, and a piezoelectric layer sandwiched between the lower electrode and the upper electrode, at least an entire surface of the piezoelectric layer being substantially flat.
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Ikehashi Tamio
Matsuo Mie
Ohguro Tatsuya
Sekine Shu-ichi
Kabushiki Kaisha Toshiba
Shah Manish S.
Stevenosky, Jr. Mark J
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