Semiconductor device having active grooves

Details Semiconductor device having active grooves Semiconductor device having active grooves

2005-04-05

2005-04-05

Tran, Minhloan (Department: 2826)

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

C257S117000, C257S127000, C257S244000, C257S280000, C257S281000, C257S284000, C257S332000

Reexamination Certificate

active

06876034

ABSTRACT:
A semiconductor device having grooves uniformly filled with semiconductor fillers is provided. Both ends of each of narrow active grooves are connected to an inner circumferential groove surrounding the active grooves. The growth speed of semiconductor fillers on both ends of the active grooves becomes equal to that at their central portions. As a result, a semiconductor device having the active grooves filled with the semiconductor fillers at a uniform height is obtained.

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