Electrical resistors – With base extending along resistance element – Resistance element and/or terminals printed or marked on base
Patent
1993-02-19
1995-05-09
Lateef, Marvin M.
Electrical resistors
With base extending along resistance element
Resistance element and/or terminals printed or marked on base
338309, 338314, H01C 1012
Patent
active
054144043
ABSTRACT:
A manufacturing method for a thin film resistor is disclosed. An insulating layer is formed on a substrate having a contact region. The insulating layer above the contact region is removed by etching to expose the contact region. A metal layer and an interlayer are then formed in sequence on the surface of the structure. The metal layer and the interlayer above the region where the resistor will be formed is next removed, and then a resistor layer is formed on the surface of the structure. The thin film resistor is completed by etching away the resistor layer except for the predetermined region where the resistor is to be formed.
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Jeong Chang B.
Song Chang S.
Donohoe Charles R.
Lateef Marvin M.
Samsung Electronics Co,. Ltd.
Westerlund, Jr. Robert A.
Whitt Stephen R.
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