Semiconductor device having a buried gate that can realize a...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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Details

C257S391000, C257S401000, C257SE21006, C257SE21147, C257SE21247, C257SE21545, C257SE21548

Reexamination Certificate

active

08004048

ABSTRACT:
A semiconductor device having a buried gate that can realize a reduction in gate-induced drain leakage is presented. The semiconductor device includes a semiconductor substrate, a buried gate, and a barrier layer. The semiconductor substrate has a groove. The buried gate is formed in a lower portion of the groove and has a lower portion wider than an upper portion. The barrier layer is formed on sidewalls of the upper portion of the buried gate.

REFERENCES:
patent: 6476444 (2002-11-01), Min
patent: 2008/0157194 (2008-07-01), Lee et al.
patent: 2008/0203455 (2008-08-01), Jang et al.
patent: 2008/0296670 (2008-12-01), Lee et al.
patent: 1020080089095 (2008-10-01), None

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