Semiconductor device for high frequency uses and...

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S337000, C257S339000, C257SE29319

Reexamination Certificate

active

07348630

ABSTRACT:
The semiconductor device has a semiconductor substrate, gate electrodes formed above the semiconductor substrate, and a pair of impurity diffusion layers formed in a surface layer of the semiconductor substrate at both sides of each of the gate electrodes. The semiconductor device also has drift layers formed in the surface layer of the semiconductor substrate between the gate electrodes and one of the impurity diffusion layers as a same conduction type as the impurity diffusion layers. The gate electrodes are made of metal including aluminum, and each is formed in an overhang shape. The semiconductor device can provide an LDMOS transistor enhanced in maximum transmission frequency and power gain and capable of a high-frequency operation with high efficiency as a basic element of a high-frequency power amplifier.

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Hiroshi Horie et al., “Polysilicon-Aluminum Substitute (PAS) Technique for Subquartermicron Logic/DRAM LSIs”, The Institute of Electronics, Information and Communication Engineers, Technical Report of IEICE, SDM 96-208, pp. 15-21, 1997.
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