Semiconductor device for driving a light valve

Details Semiconductor device for driving a light valve Semiconductor device for driving a light valve

1991-10-04

1993-08-03

Hille, Rolf

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

257659, 359 59, H01L 2701, H01L 2713

Patent

active

052332110

ABSTRACT:
The invention provides a semi-conductor light valve device and a process for fabricating the same. The device comprises a composite substrate having a supporte substrate, a light-shielding thin film formed on said supporte substrate and semiconductive thin film disposed on the light-shielding thin film with interposing an insulating thin film. A switching element made of a transistor and a transparent electrode for driving light valve are formed on the semiconductive thin film, and the switching element and the transparent electrode are connected electrically with each other. The transistor includes a channel region in the semiconductive thin film and a main gate electrode for controlling the conduction in the channel region, and the light-shielding thin film layer is so formed as to cover the channel region on the side opposite to said channel region, so as to prevent effectively a back channel and shut off the incident light.

REFERENCES:
patent: 4609930 (1986-09-01), Yamazaki
patent: 4759610 (1988-07-01), Yanagisawa
patent: 4821092 (1989-04-01), Noguchi
patent: 4984033 (1991-01-01), Ishizu et al.

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