Semiconductor device fabrication method and apparatus

Details Semiconductor device fabrication method and apparatus Semiconductor device fabrication method and apparatus

2005-09-20

2005-09-20

Ackun, Jr., Jacob K. (Department: 3723)

Abrading

Abrading process

Glass or stone abrading

C054S050000

Reexamination Certificate

active

06945854

ABSTRACT:
Provided is a semiconductor device fabrication apparatus comprising:a filter which contains a polar crystal, and filters pure water or a liquid containing pure water as a solvent; anda working section which has a pressing mechanism configured to apply a pressure to said filter, and supplies the filtered pure water or the filtered liquid containing pure water as a solvent to a surface of an object to be polished or cleaned, thereby performing a polishing process or cleaning process.

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patent: 2000-192086 (2000-07-01), None
patent: 2000-294524 (2000-10-01), None
patent: 2001-358111 (2001-12-01), None

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