Semiconductor device evaluation system using optical fiber

Details Semiconductor device evaluation system using optical fiber Semiconductor device evaluation system using optical fiber

1997-03-21

2000-02-22

Ballato, Josie

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

324501, 324760, 324753, 324703, G01R 3128

Patent

active

060284358

ABSTRACT:
In a system for evaluating a semiconductor device, a laser beam generating unit generates a laser beam, and an optical fiber receives the laser beam to heat an area of the semiconductor device. A current deviation detector or a voltage deviation detector is connected to a terminal of the semiconductor device. As a result, the current deviation detector or the voltage deviation detector detects a current deviation or a voltage deviation at the terminal of the semiconductor device.

REFERENCES:
patent: 3867697 (1975-02-01), Vanzetti
patent: 5631571 (1997-05-01), Spaziani
patent: 5804980 (1998-09-01), Nikawa
Japanese Office Action dated Mar. 31, 1998 with English language translation of Japanese Examiner's comments.
M. Sanada, "New Application of Laser Beam to Failure Analysis of LSI with Multi-Metal Layers", Microelectronics and Reliability, vol. 33, No. 7, pp. 993-1009, 1993.
M. Sanada, "Evaluation and Detection of CMOS-LSI with Abnormal IDDQ", Microelectronics and Reliability, vol. 35, No. 3, pp. 619-629, Jan. 1995.
T. Koyama et al., "Bias-free evaluation Technique for Al interconnects with sensitive OBIC", Proceedings of Japanese Applied Physics Society, 22a-7P-10, p. 586, Jan. 1994.

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