Semiconductor device and yield calculation method

Computer-aided design and analysis of circuits and semiconductor – Nanotechnology related integrated circuit design

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C716S030000, C716S030000

Reexamination Certificate

active

07870520

ABSTRACT:
A semiconductor device yield calculation method and a computer program that include selecting from a designed device pattern a specified first pattern and a second pattern that differs from the first pattern, finding a probability that the second pattern passes a test when the first pattern passes the test for each of a plurality of distances between the first pattern and the second pattern, and finding a yield of the device pattern based on a product of the probability and a yield value for the first pattern.

REFERENCES:
patent: 6324481 (2001-11-01), Atchison et al.
patent: 6393602 (2002-05-01), Atchison et al.
patent: 6717431 (2004-04-01), Rathei et al.
patent: 6751519 (2004-06-01), Satya et al.
patent: 6834375 (2004-12-01), Stine et al.
patent: 2003/0097228 (2003-05-01), Satya et al.
patent: 2008/0072207 (2008-03-01), Verma et al.
patent: 2008/0140330 (2008-06-01), Morioka et al.
C. H. Stapper; “Modeling of Integrated Circuit Defect Sensitivities”. IBM J. Res. Develop., vol. 27, No. 6 Nov. 1983, pp. 549-557.
C. H. Stapper; “Modeling of defects in integrated circuit photolithographic patterns”; IBM R4es. Develop., vol. 28, No. 4, Jul. 1984, pp. 461-475.
Jitendra Khare et al. Accurate Estimation of Defect-Related Yield Loss in Reconfigurable VLSI Circuits; IEEE Journal of Solid-State Circuits. vol. 28, No. 2, Feb. 1993, pp. 146-156.

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Semiconductor device and yield calculation method does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Semiconductor device and yield calculation method, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Semiconductor device and yield calculation method will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-2687672

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.