Semiconductor device and production method thereof

Details Semiconductor device and production method thereof Semiconductor device and production method thereof

1997-12-03

2000-05-30

Abraham, Fetsum

Active solid-state devices (e.g., transistors, solid-state diode

Field effect device

Having insulated electrode

257298, 257300, 257301, 257303, 257304, 257306, 257207, 257308, 257309, 257310, 257313, H01G 406

Patent

active

060693886

ABSTRACT:
On a silicon substrate 1 is provided a silicon oxide film 2, on which a polycrystalline silicon film 3 is formed by a low pressure CVD method at a monosilane partial pressure of no more than 10 Pa and a film formation temperature of no lower than 600.degree. C. The polycrystalline silicon film is doped with an impurity such as phosphorus in a concentration of 1.times.10.sup.20 atoms/cm.sup.3 to 1.times.10.sup.21 atoms/cm.sup.3 to form a phosphosilicate glass film 6, and after removing it, the polycrystalline silicon film is thermally oxidized in an oxidative atmosphere to form a dielectric film 5 on the surface. A polycrystalline silicon film 4 is formed on the dielectric film 5, which is treated as the oriented polycrystalline silicon film 3a to form an oriented polycrystalline silicon film 4a. The oriented polycrystalline silicon film 4a as an upper electrode and the oriented polycrystalline silicon film 3a as a lower electrode are wired to obtain a semiconductor device having a capacitor. Further, a thin film transistor of a high dielectric strength can be produced in a short time on the polycrystalline silicon which is oriented in a short time.

REFERENCES:
patent: 5220482 (1993-06-01), Takemura et al.
patent: 5290729 (1994-03-01), Hayashide et al.
patent: 5420072 (1995-05-01), Fiordalice etg al.
patent: 5859683 (1999-01-01), Tagusa et al.
patent: 5880496 (1999-03-01), Chen et al.
Y. Hayashide et al., "Fabrication of Storage Capacitance-Enhanced Capacitors with a Rough Electrode", Extended Abstracts of the 22nd Conference on Solid State Devices and Meterials, pp. 869-872 (1990).

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