Electricity: electrical systems and devices – Electrostatic capacitors – Fixed capacitor
Patent
1992-08-17
1994-08-30
Reynolds, Bruce A.
Electricity: electrical systems and devices
Electrostatic capacitors
Fixed capacitor
29 2542, 4271263, H01G 410, H01G 700, B05D 512
Patent
active
053433530
ABSTRACT:
A microminiature, large capacitor for a semiconductor memory is formed from a raw material compound of plural different kinds of metal atoms for deposition, irrespective of the material, temperature and surface condition of a substrate, thereby forming a thin dielectric film having uniform characteristics not affected by the interface even though the film is made as thin as approximately 0.1 .mu.m. The microminiature large capacitance capacitor has a capacitance unaffected by an oxide existing at the interface between a ferroelectric and electrodes without using precious metals such as platinum having the least degree of freedom in deposition of thin films and microminiature processing. The ferroelectric thin film is deposited using an organic metal comprising a plurality of kinds of metal elements in conformity with the composition of a desired dielectric. As electrodes for use in forming a capacitor, a substance exhibiting conductivity after oxidation is preferably employed.
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Kanehori Keiichi
Miki Hiroshi
Ohji Yuzuru
Tachi Shinichi
Hitachi , Ltd.
Reynolds Bruce A.
Switzer Michael D.
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