Semiconductor device and method of manufacturing the same with s

Details Semiconductor device and method of manufacturing the same with s Semiconductor device and method of manufacturing the same with s

1997-10-15

2000-02-29

Thomas, Tom

Active solid-state devices (e.g., transistors, solid-state diode

Including region containing crystal damage

257109, 257131, 257156, H01L 2630, H01L 2974

Patent

active

060312769

ABSTRACT:
A semiconductor device includes a plurality of defect layers separated from one another in the semiconductor layer. A distance separating any adjacent ones of the defect layers is kept such that they are prevented from contacting each other and those regions having effect of shortening a carrier lifetime overlap each other.

REFERENCES:
patent: 4920396 (1990-04-01), Shinohara et al.
patent: 4972239 (1990-11-01), Mihara
patent: 5243205 (1993-09-01), Kitagawa et al.
patent: 5250446 (1993-10-01), Osawa et al.

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