Semiconductor device and method of manufacturing the same

Active solid-state devices (e.g. – transistors – solid-state diode – Field effect device – Having insulated electrode

Reexamination Certificate

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C257S302000, C257S339000

Reexamination Certificate

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07420245

ABSTRACT:
A first semiconductor pillar layer of a first conductivity type is formed on a main surface of a semiconductor substrate of the first conductivity type. A second semiconductor pillar layer of a second conductivity type is formed adjacent to the first semiconductor pillar layer. A third semiconductor pillar layer of the first conductivity type is formed adjacent to the second semiconductor pillar layer. A semiconductor base layer of the second conductivity type is formed on the main surface of the second semiconductor pillar layer. An insulated-gate type semiconductor element is formed in the semiconductor base layer. The carrier concentration on the side of a main surface of each of said first through third semiconductor pillar layers is higher than a carrier concentration on the opposite side of said main surface in each of said first through third semiconductor pillar layers.

REFERENCES:
patent: 6475864 (2002-11-01), Sato et al.
patent: 6611021 (2003-08-01), Onishi et al.
patent: 6888195 (2005-05-01), Saito et al.
patent: 2004/0238844 (2004-12-01), Tokano et al.
patent: 2001-119022 (2001-04-01), None
patent: 2002-170955 (2002-06-01), None

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