Semiconductor device and method of manufacturing the same

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357 65, 357 68, 357 70, H01L 2348

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active

048455431

ABSTRACT:
A semiconductor device in which a pellet and external leads are connected by bonding wires made of aluminum containing a predetermined amount of at least one additive element, the bonding wires containing 0.05 to 3.0 weight % of at least one element selected from the group consisting of iron and palladium, or containing 0.05-3.0 weight % of at least one first element selected from the group consisting of nickel, iron and palladium and 0.05-3.0 weight % of at least one second element selected from the group consisting of magnesium, manganese and silicon, whereby the corrosion resistance of the wire is increased and the breaking strength of the wire is enhanced. The bonding wires can be connected to the semiconductor pellet by a ball bond, and it is disclosed that using a ball having a Vickers hardness of 30-50 enables good bonding of the bonding wire to, e.g., an aluminum pad on the semiconductor pellet to be achieved. A ball having such hardness can be provided by using specific aluminum alloy compositions and by a quenching of the ball. The bonding wire has the shape and height of its loop controlled by annealing the bonding wire at a specified temperature before bonding or by employing a specified composition for the material of the bonding wire. The loop shape and bondability of the bonding wire, which can be made of aluminum or an aluminum composition containing, e.g., about 1.5 weight % of magnesium, are controlled into the best states.

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Aluminium-Taschenbuch, Aluminium-Verlag Dusseldorf, 1983, pp. 231-234, 939, 1000-1002.
"Corrosion Resistant Aluminum Above 200.degree. C.", by J. E. Draley and W. E. Ruther, Argonne National Labs Publication An-5430, Jul. 15, 1955.
Streetman, Ben G., Solid State Electronic Devices, Prentice Hall, 1980, pp. 368-371.

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