Semiconductor device and method of forming semiconductor device

Details Semiconductor device and method of forming semiconductor device Semiconductor device and method of forming semiconductor device

1998-07-13

2000-12-19

Tsai, Jey

Semiconductor device manufacturing: process

Coating of substrate containing semiconductor region or of...

257759, 257762, 257763, 257765, 257506, 257508, 257522, 438622, H01L 214763

Patent

active

061627402

ABSTRACT:
A semiconductor device according to the present invention includes insulating branches which are formed as an interlayer insulating film on a semiconductor substrate. The interlayer insulating film has holes (voids) between the branches to thereby reduce electrostatic capacitance between stacked layers within a semiconductor device.

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patent: 5847464 (1998-12-01), Singh et al.
patent: 5936295 (1999-08-01), Havemann et al.
patent: 5945203 (1999-08-01), Soane
patent: 5955786 (1999-09-01), Avanzino et al.
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