Semiconductor device and method of fabricating the same

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Bump leads

Reexamination Certificate

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C257S778000, C257S779000, C257SE23021, C257SE23069

Reexamination Certificate

active

07064436

ABSTRACT:
A semiconductor device includes a semiconductor substrate and an array of protruding electrodes arranged at a pitch X1. Each of the protruding electrodes has a height X3and is formed on a barrier metal base of diameter X2coupled to an electrode arranged on the semiconductor substrate so as to satisfy the relations (X1/2)≦X2≦(3*X1/4) and (X1/2)≦X3≦(3*X1/4).

REFERENCES:
patent: 5726501 (1998-03-01), Matsubara
patent: 5880017 (1999-03-01), Schwiebert et al.
patent: 2002/0113312 (2002-08-01), Clatanoff et al.
patent: 2985426 (1991-10-01), None
patent: 11-195665 (1999-07-01), None
patent: 2000-133667 (2000-05-01), None
patent: 3407839 (2003-03-01), None

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