Stock material or miscellaneous articles – Composite – Of bituminous or tarry residue
Patent
1989-01-12
1991-05-28
Hille, Rolf
Stock material or miscellaneous articles
Composite
Of bituminous or tarry residue
357 65, 357 67, 357 71, 357 72, 428620, 428632, 428634, H01L 2348, H01L 2944, H01L 2952, H01L 2960
Patent
active
050198912
ABSTRACT:
A semiconductor device and the method of fabricating the semiconductor device include a semiconductor substrate and a plurality of conductor films formed on the substrate. Each of the conductor films is made of aluminum alloy including at least one element selected from palladium and platinum and, more preferably, further including at least one element selected from lithium, beryllium, magnesium, manganese, iron, cobalt, nickel, copper, lanthanum, cerium, chromium hafnium, zirconium, cadmium, titanium, tungsten, vanadium, tantalum, and niobium, with a protective film which includes oxide of the selected one of palladium and platinum being formed on the side wall of the conductor film.
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Kobuchi et al., "Development of Corrosion Resistant Al Alloy Conductor for Semiconductors", ELS, 172nd, vol. 87-2, #280, pp. 396-397.
Fukada Shinichi
Itagaki Tatsuo
Koubuchi Yasushi
Miyazaki Kunio
Onuki Jin
Hille Rolf
Hitachi , Ltd.
Ostrowski David
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